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Evaluating LLM-based AI agents integrated with materials synthesis tools: the case of atomic layer deposition

arXiv · AI, language, vision and robotics · article · Aug 29, 2026 · UTC

This work provides an overview of the different strategies that can be used to evaluate the performance of AI models and agents based on large language models (LLMs) for materials synthesis. After providing a brief overview of the key technologies behind the current generation of AI agents based on LLMs, we summarize the different approaches to evaluating these models in the context of materials science and in particular on materials synthesis, with a specific emphasis on scenarios in which the models are directly integrated with experimental tools. We discuss evaluation strategies spanning kn

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