SOURCE-LINKED INTELLIGENCE
NEXT GENENRATION OF X-RAY METROLOGY
within the semiconductor market of X-ray metrology for MEMS, photonics and sensors. Within the WomenTechEU programme Sirius X-ray Solutions will finalise and integrate the software toolbox, based on machine learning and theoretical models' simulation, into the Sirius XRS platform to optimise the software's analytical performance. X-Ray metrology, MEMs, photonics, semiconductor
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- recordType
- award
- status
- CLOSED
- region
- EU
- value
- 75000
- unit
- EUR
Evidence & attribution
European Commission, CORDIS Horizon Europe project dataset. Metadata adapted.
License: CORDIS reuse policy
First collected: 2026-09-20T01:21:06.728Z. This is not the publication date.